OLED Lighting In-Line Equipment

OLED Device Evaporation System Line (200 X 200)

 

Loading Chamber

  • ITO substrate size: 200 x 200 mm2
  • Vacuum degree < 5 x 10-2 Torr
  • Substrate auto transfer system

Organic Evaporation Chamber Characteristic

  • ITO substrate size: 200 x 200 mm2
  • Four organic heater & source each chamber 
  • Vacuum degree < 5 x 10-6 Torr
  • Evaporation rate auto-adjustment system
  • Auto transfer system
  • Chamber quantity scalability

Metal Evaporation Chamber Characteristic

  • ITO substrate size: 200 x 200 mm2
  • Metal heater & source
  • 4-inch glass window
  • Vacuum degree < 5 x 10-6 Torr
  • Evaporation rate auto-adjustment system
  • Auto transfer system

Take-out Chamber

  • ITO substrate size: 200 x 200 mm2
  • Vacuum degree < 5 x 10-2 Torr
  • Auto assembly system

Related

Lumlight Video
Flexible OLED Panel (size: 100mm X 100mm)
Contact Us
  • Address:
    1,2F No.9,Gongye E. 9th Rd., Science-Based Industrial Park, Hsinchu County 30075, Taiwan, R.O.C.
  • Tel: +886-3-666-8800
  • Fax: +886-3-666-7058
  • Email: sales@lumlight.com.tw
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